SMIF load port interface including smart port door
US6530736B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 13, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Jul 13, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.