Micropump
US6530755B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Mar 26, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/1041
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The ejection orifice (7) of a micropump including a baseplate (3) of glass and a cover plate (4) of silicon and intended for ejecting small liquid drops, has a diameter of about 50 &mgr;m, and is located in the center of a flat front surface (12) which, in order to avoid accumulations of liquid in the region of the ejection orifice (7), is only 8 times the area thereof and, along a continuous circular edge, is adjacent a lateral surface (13) in the form of an envelope of truncated cone. The front surface (12) and the lateral surface (13) have a surface roughness of not more than N4 and are provided, for example, with a hydrophobic plasma polymer coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.