Method of cooling an induction coil
US6531942B2 · kind B2 · utility
2Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | May 18, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a method of cooling an immersed induction coil, such as an ionizing coil used in a vacuum processing chamber. The coil 10 may comprise a coiled hollow tube 11 through which coolant can flow when pumped by a pump 13. A valve 16 is provided so that air can be passed through the tube in either direction and the direction of flow is controlled by a controller 19, which acts on the valve 16. The rate of switching of the valve 16 can be determined by a process condition or by monitoring the temperature of the downstream coolant and/or the coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.