Direct acting vertical thermal actuator with controlled bending

US6531947B1 · kind B1 · utility

Assignee

• 3M INNOVATIVE PROPERTIES COMPANY · US

Inventors

• Billy L. Weaver · Eagan, US
• Douglas P. Goetz · Windom, US
• Kathy L. Hagen · Stillwater, US
• Mike E. Hamerly · Vadnais Heights, US
• Robert Gordon Smith · Vadnais Heights, US
• Silva K. Theiss · Windom, US

Key dates

• Filing date: Sep 12, 2000
• Grant date: Mar 11, 2003
• Expiry date: Dec 3, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H2061/008
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.