Free-space diffraction measurement of a phase mask for fabrication of a waveguide Bragg grating
US6532074B1 · kind B1 · utility
2Cited by
4References
13Claims
0Family size
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Key dates
| Filing date | May 30, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | May 30, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12173
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Techniques for optically evaluating phase masks for fabricating waveguide Bragg gratings by measuring diffraction orders.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.