System and method for canceling ringing in a MEMS device
US6532096B2 · kind B2 · utility
2Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | May 7, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Finite Impulse Response (FIR) filter for suppressing ringing in tunable, or adjustable, members of MEMS devices is described. In embodiments of the invention, the FIR filter includes staggered proportional plus delay filters, or posicast filters. The FIR filter of the present invention is applicable to an adjustable mechanical member in a MEMS device which can be modeled as single mode second order system characterized by a resonance frequency &ohgr;0 and damping constant &zgr;<<1, i.e., a highly underdamped, single mode, second order system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.