Angular velocity sensor and process for manufacturing the same
US6532817B1 · kind B1 · utility
10Cited by
72References
6Claims
0Family size
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Key dates
| Filing date | Apr 27, 1999 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Apr 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integral bimorph angular rate sensor is formed by directly bonding two tuning fork members in the thickness direction to enhance the detecting sensitivity of the angular velocity sensor. The individual tuning fork members are formed from a single crystalline piezoelectric material such as quartz and are bonded in the crystal axis direction as to establish a piezoelectric phenomenon wherein the piezoelectric materials of the bonded tuning fork members have inverse polarities in their width or thickness directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.