Process for producing semiconductor article
US6534382B1 · kind B1 · utility
388Cited by
23References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2000 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Aug 8, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process for producing a semiconductor article is provided which comprises the steps of bonding a film onto a substrate having a porous semiconductor layer, and separating the film from the substrate at the porous semiconductor layer by applying a force to the film in a peeling direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.