Radiation imaging detector and method of fabrication
US6534773B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1999 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Nov 9, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/20183
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A radiation imaging detector has a scintillator array to be optically and mechanically coupled to a photodiode array, such that scintillator segments of the scintillator array are positioned over and aligned with respective pixels of the photodiode array. A metallic grid is deposited on the photodiode array to provide sufficient optical contrast for accurate visual alignment of the scintillator and photodiode arrays during fabrication. The metallic grid additionally serves to lower the series resistance of the photodiode entrance electrode. After alignment of the arrays, the upper surface of the scintillator array is closed by a reflective structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.