Microelectronic mechanical systems (MEMS) switch and method of fabrication
US6535091B2 · kind B2 · utility
16Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2001 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Nov 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H59/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectronic mechanical systems (MEMS) switch includes a vane formed over a substrate for electrically coupling an input line to an output line formed on the substrate. The vane includes flexible hinges, which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down and pull-back electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.