Free-space optical wavelength routing element based on stepwise controlled tilting mirrors
US6535319B2 · kind B2 · utility
30Cited by
11References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2001 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Jul 3, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microstructure for steering light is provided. A pivot member is connected with a structural film and supports a base that includes a reflective coating. A fixed rotational actuator is connected with the structural film and is configured to rotate the base on the pivot member upon actuation. A movable hard stop is connected with the structural film. The movable hard stop is configured such that in each of a plurality of its positions, the base assumes one of a plurality of tilt positions upon actuation of the fixed rotational actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.