Vertical cavity apparatus with tunnel junction
US6535541B1 · kind B1 · utility
35Cited by
106References
55Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2000 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Sep 1, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/8142
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vertical cavity apparatus includes first and second mirrors, a substrate, first and second active regions and a plurality of individual active regions. Each of an individual active region is positioned between the first and second active regions. A first oxide layer is positioned between the first mirror and the second mirror. A plurality of tunnel junctions are positioned between the first and second mirrors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.