Electrical testing of waveguides
US6535659B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 9, 2001 |
| Grant date | Mar 18, 2003 |
| Priority date | — |
| Expiry date | Jan 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated waveguide array structure allows electrical testing of each unit for shorts between waveguide elements of the array, and shorts between waveguides and the substrate prior to assembly into a larger optico-electronic unit. Multiple waveguide array structures are formed on a wafer, each waveguide array being provided with a cross bar connected to an electrical contact at each end, such that alternate waveguide elements of the array are electrically connected. When connected to a suitable testing device, the existence of shorts between adjacent elements can be immediately detected. Following testing, the cross bar and electrical contact are removed by scribing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.