Capacitive micro sensor, gyroscope, and input device
US6536281B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2001 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Jan 9, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/031
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.