Differential pressure sensor

US6536288B2 · kind B2 · utility

Assignee

• ABB PATENT GMBH · DE

Inventors

• Wolfgang Scholz · Minden, DE
• Albrecht Vogel · Oberkochen, DE
• Peter Krippner · Karlsruhe, DE
• Dieter Binz · Hirschberg, DE

Key dates

• Filing date: Jun 14, 2002
• Grant date: Mar 25, 2003
• Expiry date: Jun 14, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0073
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

There is described a differential pressure sensor made using glass-silicon technology with a diaphragm plate arranged between two carrier plates. To achieve a high resolution at the beginning of the measuring range in conjunction with high overload resistance, the measuring diaphragm plate of the sensor has for a prescribed measuring range within the same measuring chambers a plurality of mutually independent deflectable regions as measuring diaphragms. Each such region acts as a part-sensor with a part-measuring range. The part-measuring ranges of the part-sensors overlap and in total are equal to the prescribed measuring range of the differential pressure sensor. The displacement of the measuring diaphragm of each part-sensor is mechanically limited outside its part-measuring range by the carrier plates.