Fluorinated solvent compositions containing ozone
US6537380B2 · kind B2 · utility
5Cited by
11References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2002 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Jan 7, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A homogeneous non-aqueous composition containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.