Method and apparatus for restricting process fluid flow within a showerhead assembly
US6537420B2 · kind B2 · utility
11Cited by
12References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 7, 2000 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Jan 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6708
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system and method are disclosed for restricting process fluid flow within a showerhead assembly which includes a process chamber (12) with a showerhead assembly (20) disposed therein. The showerhead assembly (20) has a blocking assembly (24) disposed within the showerhead assembly (20) for restricting the flow of process fluid within the showerhead assembly (20). Restricting the flow of process fluid within the showerhead effectively restricts the flow of process fluid exiting a center portion (30) of showerhead assembly (20), directed at a substrate wafer (16) disposed within the process chamber (12).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.