Apparatus for holding a quartz furnace
US6538237B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2002 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Jan 8, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68728
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for fixing the position of a quartz furnace tube in a semiconductor processing furnace is described. The furnace is of the type that has a cylindrical body possessing an open end through which the tube may be withdrawn, and a base postioned on the open end, wherein the tube includes a flange portion secured to the base through which gas may be withdrawn from or introduced into the furnace tube. The tube is coaxially disposed within the furnace body. The apparatus may include two clamp halves each has a half-circular shape for engaging the flange portion of the furnace tube onto the base, and a mounting means for mounting the two clamp halves to the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.