Patent · US Expired

Method and device for measuring absolute interferometric length

US6538746B1 · kind B1 · utility

9Cited by
4References
6Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 17, 2000
Grant dateMar 25, 2003
Priority date—
Expiry dateNov 17, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/45
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A single laser is stabilized sequentially in time with respect to different wavelengths in conjunction with a continuous, preferably linear, wavelength transition for absolute optical interferometric measurement. During the wavelength transition, the number of the traversing interferences is counted in a measuring channel. The length of a measuring section may be measured in absolute terms to give known and stable wavelengths and phase measurements of the two wavelengths. Active integrated optics and residual phase measurement by compensation in the integrated optics make it possible to detect wavelength differences of 10−7 &lgr;.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.