Patent · US Expired

Flexure hinge phase shift adapter for fizeau interferometer

US6538747B1 · kind B1 · utility

9Cited by
3References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 28, 2000
Grant dateMar 25, 2003
Priority date
Expiry dateOct 17, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/35
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An adapter for mounting on an interferometer to provide a phase shift of the reference transmission sphere or flat used on the output of the interferometer is made of a monolithic body separated into two portions. The first portion is a fixed end support portion that mounts on the interferometer, and the second portion is a movable end support portion that mounts the sphere or flat that is used for transmission of the optic beam. The movable end support portion is mounted and the fixed end support portion are connected through flexure hinges that permit axial movement between the support portions, and a single actuator can be used between the support portions for causing axial movement. The flexure hinges are located so the adapter is very stiff against all motions except axial motions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.