Optical element mount comprising an optical element holding frame

US6538829B2 · kind B2 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Johannes Rau · Gerstetten, DE
• Wolfgang Hummel · Dresden, DE
• Juergen Fischer · Adelsheim, DE

Key dates

• Filing date: Aug 14, 2001
• Grant date: Mar 25, 2003
• Expiry date: Aug 14, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/023
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An adjusting optical element mount (1) serves for the position of two components (2a, 2b) in relation to one another, in particular of two carrier elements for optical elements, such as mirrors or lenses, in particular as an axial and/or angle manipulator for lithography lenses. The components (2a, 2b) can be adjusted in relation to one another via the action of force (F, T). Each of the components (2a, 2b) has at least three hinges (4a, 4b, 4c, 4d, 5a, 5b, 5c, 5d). Each of the hinges (4a, 4b, 4c, 4d) of one component (2a) is connected in each case to a corresponding hinge (5a, 5b, 5c, 5d) of the respectively other component (2b) to form a pair of hinges (7a, 7b, 7c, 7d) via a lever element (6a, 6b, 6c, 6d) in each case. Each of the pairs of hinges (7a, 7b, 7c, 7d) is connected in each case to at least one lever (8a, 8b, 8c, 8d; 13, 13′) of at least one of the adjacent pairs of hinges (7a, 7b, 7c, 7d) via the at least one lever (8a, 8b, 8c, 8d; 13, 13′)and at least one further hinge (9, 9′; 9a, 9b; 9a′, 9b′) in each case.