Method and apparatus for process control using fourier transform infrared spectroscopy
US6539285B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2000 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Mar 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/3595
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention concerns a method and a device for process control of reaction processes using Fourier transform infrared spectroscopy. In accordance with the invention, an interferogram is generated before or after interaction with the compositions. Subsequent thereto, the interferogram is inspected in segments for externally introduced intensity fluctuations. The intensity fluctuations are subjected to an analysis procedure involving integration, differentiation, or the like, and on the basis of this evaluation, a decision is made as to whether or not the interferogram has an acceptable degree of interfering signals. The interferogram is labeled with this evaluation result and the procedure is repeated a plurality of times. After a sufficient number of acceptable interferograms have been collected, the acceptable interferograms are summed and subjected to a Fourier transform process to extract the frequency dependence. In this manner, Fourier transformation infrared spectroscopy techniques can be applied for process control of processes which would otherwise be impossible due to unacceptably large degrees of interference caused primarily by bubble formation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.