Two-axis yaw rate sensor
US6539804B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 9, 2000 |
| Grant date | Apr 1, 2003 |
| Priority date | — |
| Expiry date | Jun 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5677
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A two-axis yaw rate sensor (1) includes a vibration ring (15) and a ring support plate for supporting the vibration ring (15). The vibration ring (15) includes first to fourth vibrating drive surfaces (16a-16d) arranged in turn in a circumferential direction and narrow portions (17) located between the adjacent drive surfaces (16a-16d). The first and the third drive surfaces (16a, 16c) are opposed to one another on the axis Y passing through the center of the vibration ring (15). The second and the fourth drive surfaces (16b, 16d) are opposed to one another on the axis X passing through the center of the vibration ring (15). The axis Y is substantially perpendicular to the axis X. A PZT film (15) is formed on the drive surfaces (16a-16d) and vibrates the drive surfaces (16a-16d) in a radial direction of the vibrating ring (15). A weight (21) is coupled to a coupling portion (22) of each drive surface (16a-16d) and vibrates in a direction substantially perpendicular to the vibrating direction of the vibrating surfaces (16a-16d). Detection electrode films (24a-24d) are formed on the coupling portions (22) and detect the deformation of the corresponding coupling portions (22).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.