Piezoelectric/electrostrictive film element
US6541895B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 4, 2002 |
| Grant date | Apr 1, 2003 |
| Priority date | — |
| Expiry date | Mar 4, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A lower electrode on a substrate is continuously formed from one thick portion at the periphery to a thin diaphragm portion. An auxiliary electrode is continuously formed from a position of the thin diaphragm portion independent of the lower electrode to the other thick portion at the periphery. A piezoelectric/electrostrictive film is formed over the lower electrode and auxiliary electrode.Since an incompletely bonded portion that can cause variation and time-dependent changes is not structured to extend over the thin diaphragm portion and the thick portions, it is possible to provide an element which has stable characteristics and which can be used under any condition. Further, since the incomplete bonded portion does not reside at ends of the thin diaphragm portion where the piezoelectric/electrostrictive film is likely to crack in the structure, it is possible to completely prevent the piezoelectric/electrostrictive film from cracking regardless of the type and characteristics of the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.