Integrated 3-dimensional multi-layer thin-film optical couplers and attenuators
US6542671B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2001 |
| Grant date | Apr 1, 2003 |
| Priority date | — |
| Expiry date | Dec 12, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12109
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated optical device has two waveguide layers that are patterned to provide 2-dimensional interconnected networks of waveguides. A filter layer between the two waveguide layers is made by sputter deposition of thin films with alternating indexes of refraction. Light traveling vertically through the filter layer experiences an interferometric effect. A deflecting bump is formed in the plane of the lower waveguide layer. The bump is isotropicly etched, undercutting a photo-mask over the bump, producing a rounded, concave profile to the bump. High-index material is deposited over the bump and patterned to form a waveguide that has light deflected by the bump upward. The filter is formed over the bump to receive the deflected light. The filter reflects some light back down to the bump to another waveguide in the first layer. Light transmitted vertically up through the filter is bent to the horizontal plane of the upper waveguide layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.