Scanning probe microscope with probe integrated in an optical system

US6545263B2 · kind B2 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Ralph Lange · Rutesheim, DE
• Torsten Antrack · Berlin, DE
• Martin Voelcker · Oberkochen, DE

Key dates

• Filing date: Nov 6, 1998
• Grant date: Apr 8, 2003
• Expiry date: Nov 6, 2018

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y35/00
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

An illumination device for a light microscope comprises a scanning microscope probe which is integrated in the center thereof. A scanning probe microscope comprising such illumination device is also disclosed.