Scanning probe microscope
US6545470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2002 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Apr 1, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
It is an object to obtain a scanning probe microscope capable of effectively suppressing a reduction in precision in a measurement. A conductive probe (2C) has such a pyramid structure as to be expanded from a tip portion to a bottom surface (a surface on which a cantilever (1) is to be formed) and a semiconductor integrated circuit (12) is formed in a side surface of the conductive probe (2C). An amplifying circuit (12a) to be the semiconductor integrated circuit (12) amplifies an electrical characteristic signal given from the conductive probe (2C) to send the electrical characteristic signal to a signal processor (10) through a conductive cantilever (1C) and a signal cable (9).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.