Method and apparatus for self-calibration of capacitive sensors
US6545495B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2001 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Apr 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining operational characteristics of capacitive sensors adapted for self-calibration includes the steps of providing at least one capacitive sensor having a suspended element and a pick-up plate. An AC input signal is applied to one of the plates, while force is provided between the plates, the force capable of variation. At least one operational characteristic of capacitive sensors can be determined, such as the suspended element spring constant and the gap distance between the plates. A capacitive sensor system adapted for self-calibration includes at least one capacitive sensor having a suspended element and a pick-up plate, a self-testing and calibration network, and a structure for generating force between the plates, the force capable of variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.