Amorphous carbon insulation and carbon nanotube wires
US6548313B1 · kind B1 · utility
26Cited by
11References
13Claims
0Family size
Assignee
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Key dates
| Filing date | May 31, 2002 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | May 31, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/932
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An apparatus includes a carbon nanotube coupled with a first device and a second device of an integrated circuit, wherein electrons can flow between the first device and the second device along the carbon nanotube. Doped amorphous carbon is deposited on the integrated circuit structure. The doped amorphous carbon is planarizing and patterned to form a trench. Carbon based precursor material is deposited in the trench. The carbon based precursor material is converted into the carbon nanotube, wherein the carbon nanotube connects the first device with the second device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.