Patent · US Expired

Apparatus and method for hermetically sealing and EMI shielding integrated circuits for high speed electronic packages

US6548893B1 · kind B1 · utility

1Cited by
6References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 3, 2001
Grant dateApr 15, 2003
Priority date
Expiry dateJul 3, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An apparatus and method for hermetically sealing, EMI shielding integrated circuits for high-speed electronic devices using a combination of microstrip to buried stripline interface for signal transmission from the integrated circuit. The packaging provided comprises a first plurality of microstrips interconnecting the integrated circuit to a plurality of buried striplines exposed on a surface of the main substrate. A ceramic interposer placed over the main substrate “buries” a portion of the exposed striplines on the main substrate to thereby insulate these signal paths from a hermetically sealing, and EMI shielding metal lid placed over the integrated circuit. The metal lid and the seal ring brazed over the ceramic interposer thus provide both a hermetic seal and an electric radiation block. A reduction in dispersion due to the buried striplines is also achieved, as well as improving jitter performance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.