Patent · US Expired

Semicoductor passivation using barrier coatings

US6548912B1 · kind B1 · utility

135Cited by
60References
56Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 15, 2000
Grant dateApr 15, 2003
Priority date
Expiry dateMay 15, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An encapsulated microelectronic device. The device includes a semiconductor substrate, microelectronic device adjacent to the semiconductor substrate, and at least one first barrier stack adjacent to the microelectronic device. The barrier stack encapsulates the microelectronic device. It includes at least one first barrier layer and at least one first polymer layer. The encapsulated microelectronic device optionally includes at least one second barrier stack located between the semiconductor substrate and the microelectronic device. The second barrier stack includes at least one second barrier layer and at least one second polymer layer. A method for making an encapsulated microelectronic device is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.