Differential amplification for micro-electro-mechanical ultra-sensitive accelerometer
US6550330B1 · kind B1 · utility
13Cited by
11References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2001 |
| Grant date | Apr 22, 2003 |
| Priority date | — |
| Expiry date | Jun 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improvement to an optical accelerometer based upon the monolithic integration of a Fabry-Perot interferometer and a p+n silicon photosensor includes using one or more pairs of optical accelerometers wherein each pair provides for greater accelerometer sensitivity than a single independent accelerometer, and allows for a reduction in common mode noise due to amplitude and phase difference variations of the utilized light source as well as supply voltage. The differential approach of the invention provides for the biasing of the optical accelerometers such that their output signals are 180 degrees out of phase with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.