Process for producing a piezoelectric element using a first SOL and a second SOL having a lead content greater than the first SOL
US6551652B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 30, 1999 |
| Grant date | Apr 22, 2003 |
| Priority date | — |
| Expiry date | Nov 30, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by AxByO3, and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.