Two-stage three-terminal thermionic/thermoelectric coolers

US6552256B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Ali Shakouri · West Lafayette, US
• Christopher J. LaBounty · Goleta, US
• John E. Bowers · Lompoc, US

Key dates

• Filing date: Mar 6, 2001
• Grant date: Apr 22, 2003
• Expiry date: Mar 6, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S257/93

Abstract

A multi-stage cooler is formed from monolithically integrated thermionic and thermoelectric coolers, wherein the thermionic and thermoelectric coolers each have a separate electrical connection and a common ground, thereby forming a three terminal device. The thermionic cooler is comprised of a superlattice barrier surrounded by cathode and anode layers grown onto an appropriate substrate, one or more metal contacts with a finite surface area deposited on top of the cathode layer, and one or more mesas of different areas formed by etching around the contacts to the anode layer. The thermoelectric cooler is defined by metal contacts deposited on the anode layer or the substrate itself. A backside metal is deposited on the substrate for connecting to the common ground.