Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors
US6552328B1 · kind B1 · utility
5Cited by
5References
13Claims
0Family size
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Key dates
| Filing date | Feb 22, 2000 |
| Grant date | Apr 22, 2003 |
| Priority date | — |
| Expiry date | Feb 22, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/02325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microsensor including a VCSEL for use in a MEMS. By coupling the top mirror of the VCSEL to the micromechanical structure, either directly or indirectly, the motion of the micromechanical structure in response to a physical phenomenon can directly modulate the wavelength of the light emitted from the VCSEL. Also, a method for sensing and transmitting information about the configuration or motion of a mechanical structure. The method includes coupling the top mirror of a VCSEL to the mechanical structure that directly encodes information about the motion into the frequency of light emitted by the VCSEL.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.