Patent · US Expired

Integratable transducer structure

US6552404B1 · kind B1 · utility

76Cited by
13References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 2001
Grant dateApr 22, 2003
Priority date—
Expiry dateApr 17, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L9/0019
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Electro-mechanical structures and methods for forming same are disclosed. The structures are integratable onto an integrated circuit. The structures have a deformeable element formed in a plane substantially perpendicular to the substrate of the integrated circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.