Stage system with onboard linear motor
US6552449B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2002 |
| Grant date | Apr 22, 2003 |
| Priority date | — |
| Expiry date | Apr 5, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Here is disclosed a stage system enabling position control of a tiny angle by virtue of a linear motor and becoming greater in response ability, with even slimness and small size in construction. The stage system has a first stage lying on a base stage for linear movement in an X-direction relatively to the base stage, a second stage lying on the first stage for linear movement relatively to the first stage in a Y-direction, a turning stage lying on the second stage to be supported through rolling bearing means on the second stage, and a turning linear motor for driving the turning stage over a tiny amount of angle in either direction of rotation. The turning linear motor is comprised of a primary side of more than one armature winding arranged in juxtaposition in straight line on the second stage, and a secondary side of field magnets arranged in juxtaposition in opposition to the armature winding on the turning stage, with magnetic poles alternating in polarity in straight line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.