Patent · US Expired

Optical system

US6552783B1 · kind B1 · utility

21Cited by

17References

40Claims

0Family size

Assignee

Teradyne, Inc. · US

Inventors

Peter Schmidt · Ellerstadt, DE
Pamela R. Lipson · Cambridge, US
John C. Bowman · Pittsburgh, US

Key dates

Filing date	Jun 28, 2000
Grant date	Apr 22, 2003
Priority date	—
Expiry date	Oct 20, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/062
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An optical system for use in an inspection system is described. The optical system includes an imaging system which may be provided as a multi-spectral band pass image recording system and a lighting system which includes at least one coaxial light and at least one side light to provide spectral discrimination and to provide contrast between a first surface made from a first material and a second surface made from a second different material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.