Apparatus for manufacturing high concentration ozone gas
US6555072B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2001 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Apr 20, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/402
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for manufacturing high concentration ozone gas, characterized by employing a pressure swing adsorbing apparatus having a plurality of adsorbing layers filled with ozone adsorbent, in which the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate. A method and apparatus for manufacturing high concentration ozone gas, characterized by employing a TSA adsorbing system, discharging oxygen concentrated gas at a relatively low temperature from the adsorbing layers, passing purge gas at a relatively high temperature into the adsorbing layers in the desorbing process in an opposite direction of the gas flow in the adsorbing process, and recovering the concentrated ozone gas continuously, in which the ozone adsorbent is one or two or more kinds of above adsorbent, and the gas containing ozone from the ozone generating apparatus is cooled by the oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers in the adsorbing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.