Device for monitoring a processing liquid
US6555379B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Sep 8, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/209163
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for monitoring a processing liquid comprising at least one sensor for generating at least one monitoring signal, and a device for processing the monitoring signal and for generating a control signal for directly or indirectly influencing the composition or condition of the processing liquid. A device is also provided for detecting, storing, and maintaining the reliability of performance of the sensor. In addition, actuators are provided for converting given criteria or specified values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.