Substrate with fluidic channel and method of manufacturing
US6555480B2 · kind B2 · utility
31Cited by
13References
66Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2001 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Nov 23, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1645
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of manufacturing a fluidic channel through a substrate includes etching an exposed section on a first surface of the substrate, and coating the etched section of the substrate. The etching and the coating are alternatingly repeated until the fluidic channel is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.