MEMS based variable optical attenuator (MBVOA)
US6556338B2 · kind B2 · utility
93Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2001 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Nov 2, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.