Method to construct variable-area capacitive transducers
US6556417B2 · kind B2 · utility
3Cited by
12References
20Claims
0Family size
Inventors
Key dates
| Filing date | Apr 13, 2001 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Oct 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/43
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method to construct a capacitive transducers comprising the steps of forming over and in a planar surface of a substrate at least one rigid electrode of a variable-area capacitor electrically connected to a location on said substrate reserved for electrode attachment; providing a cooperating flexible electrode with a dielectric layer; and bonding said flexible electrode to said substrate in a surface region surrounding said rigid electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.