Electronic damping of MEMS devices using a look-up table
US6556739B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2001 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In one embodiment, a MEMS apparatus having a MEMS array including a plurality of MEMS devices is provided. In some embodiments, each of the plurality of MEMS devices includes a movable structure and a second structure. In addition, in some embodiments, a plurality of signal sources are coupled to the plurality of MEMS devices so as to be capable of supplying actuation signals for actuating the movable structure to impact the second structure. Further, in some embodiments, at least one processor is coupled to the plurality of signal sources to control the actuation signals, and is configured such that each of the plurality of MEMS devices is provided with a corresponding custom actuation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.