MEMS optical switch with torsional hinge and method of fabrication thereof
US6556741B1 · kind B1 · utility
28Cited by
35References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 25, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Nov 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In at least one embodiment, an apparatus having a first structure, a second structure, and a hinge coupled between the first and second structures. The hinge has a first flexible member aligned substantially along an axis. The hinge is arranged so that the second structure can rotate relative to the first structure substantially about the axis. The hinge can also include a second flexible member aligned substantially along the axis. The first and second flexible members being positioned on opposite sides of the second structure. In at least one embodiment, a method includes steps of fabrication of the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.