Microwave gas decomposition reactor
US6558635B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Mar 12, 2001 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Oct 7, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/007
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A microwave reactor for decomposing waste green house gases resulting from the manufacture of semiconductors and from other industrial processes. The microwave reactor includes a plasma chamber having a gas inflow port spaced apart from a gas outflow port for transporting gases through the plasma chamber. A gas plasma is generated in the plasma chamber to facilitate the gas decomposition. The structure of the microwave reactor includes an insulating cover protruding into the plasma chamber and forming an internal cavity that is isolated from gases in the plasma chamber. A microwave antenna extends into the internal cavity of the plasma chamber to couple the microwave energy into plasma chamber for causing a plasma to form in the gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.