Relation to the manufacture of masks and electronic parts
US6558872B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2000 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Dec 26, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/145
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Imagable precursors for masks and for electronic parts comprise a polymeric layer applied to a substrate. The layer comprises at least one polymer having infra-red absorbing groups carried as pendent groups on the polymer backbone. Certain infra-red absorbing groups may also act to insolubilize the polymer in a developer, until it is imagewise exposed to infra-red radiation. Imagewise application of heat, resulting from imagewise exposure of the precursor to infra-red radiation, renders the polymer layer more soluble in the developer than prior to exposure to the infra-red radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.