Spin-on-dielectric compositions with coating enhancer
US6559215B2 · kind B2 · utility
10Cited by
6References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2001 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Jul 18, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G2261/312
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
This invention is a composition comprising (a) an oligomer or polymer dispersible in an organic solvent, having a low dielectric constant, or being curable to form a material having a low dielectric constant, (b) at least one organic solvent and (c) less than 1000 parts by weight of a polymeric coating additive per million parts by weight of total composition (ppm). The polymeric additive is characterized in that it is miscible with component (a) and the solvent system but becomes incompatible with the mixture of component (a) and solvent during the coating process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.