Overload-proof pressure sensor

US6561037B2 · kind B2 · utility

Assignee

• VEGA Grieshaber KG · DE

Inventors

• Ewald Bohler · Wolfach, DE
• Jorn Jakob · Wolfach, DE
• Manfred Liehr · Hamburg, DE

Key dates

• Filing date: Jun 25, 2001
• Grant date: May 13, 2003
• Expiry date: Jun 25, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0072
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention pertains to a pressure sensor for a pressure measuring transducer which contains a base body (3), and a pressure-sensitive measuring membrane (7). The membrane is located on the base body (3) and can be subjected to a measurable pressure. The first chamber (10) is arranged between the base body (3) and the measuring membrane (7) in order to protect the measuring membrane (7) if the pressure to be measured exceeds an upper pressure limit. A second chamber (11) is provided to protect the measuring membrane (7) if the pressure to be measured falls short of a lower pressure limit. The second chamber (11) is arranged between the measuring membrane (7) and a contact plate (5) The contact plate is situated on the side of the measuring membrane (7) opposite the base body (3). A bore (6) is provided for subjecting the measuring membrane (7) to pressure.