Patent · US Expired

Turbomolecular pump

US6561755B1 · kind B1 · utility

2Cited by
5References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 21, 2000
Grant dateMay 13, 2003
Priority date
Expiry dateNov 21, 2020

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF04D29/542
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A turbomolecular pump including a cylindrical housing, and rotor and stator discs arranged in the housing and cooperating with each other to produce a pumping effect, with the cylindrical housing being formed of at least two housing parts separated along a cylinder axis and each formed, together with respective separated sections of the stator discs, as a one-piece unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.