Turbomolecular pump
US6561755B1 · kind B1 · utility
2Cited by
5References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2000 |
| Grant date | May 13, 2003 |
| Priority date | — |
| Expiry date | Nov 21, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/542
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular pump including a cylindrical housing, and rotor and stator discs arranged in the housing and cooperating with each other to produce a pumping effect, with the cylindrical housing being formed of at least two housing parts separated along a cylinder axis and each formed, together with respective separated sections of the stator discs, as a one-piece unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.